METROLOGICAL APPARATUS AND A METHOD OF DETERMINING A SURFACE CHARACTERISTIC OR CHARACTERISTICS
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United States of America Patent
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Issued Date -
Nov 20, 2014
app pub date -
Nov 28, 2012
filing date -
Nov 30, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A metrological apparatus has a surface data determiner to determine from measurement data a measured surface roughness data set (150) representing measured surface roughness and including any vibration induced measurement error and a harmonic model provider (120) providing a harmonic model representing vibration-induced surface characteristics of the surface as a set of harmonic components selected based on a surface form of the surface of the workpiece. A surface roughness determiner (140) uses the harmonic model and the measured surface roughness data to obtain a modified surface roughness data set in which vibration induced measurement error is suppressed.
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