WAFER TRANSPORT APPARATUS

United States of America Patent

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Issued Date
Nov 27, 2014
app pub date
Dec 15, 2011
filing date
Dec 15, 2011

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Abandoned

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Abstract

An object is to make it possible to adequately reduce the wafer transport time and to contribute to size-reduction of the semiconductor processing system.

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Patent Owner	Address
TAZMO CO LTD	5311 HAGA KITA-KU OKAYAMA-SHI OKAYAMA 7011221 ?7011221

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Inventor Name	Address	# of filed Patents	Total Citations
Imai, Shinichi	Okayama, JP	92	1609
Nishijima, Yoshiki	Okayama, JP	3	471
Sakata, Kosuke	Okayama, JP	19	480
Tsukimoto, Hiroaki	Okayama, JP	3	471
Yamazoe, Katsuhiro	Okayama, JP	7	593

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WAFER TRANSPORT APPARATUS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

14365419

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14365419

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