DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
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United States of America Patent
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Issued Date -
Nov 27, 2014
app pub date -
May 22, 2014
filing date -
May 24, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention provides a drawing apparatus for performing drawing on a substrate with a plurality of charged particle beams, the apparatus including an aperture array member in which a plurality of first apertures, for generating the plurality of charged particle beams, is formed, and a generating device configured to individually generate electric potentials in a plurality of regions of the aperture array member, wherein each of the plurality of regions corresponds to at least one of the plurality of first apertures.
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