METHOD FOR USING METAL BILAYER
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United States of America Patent
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app pub date -
Aug 13, 2014
filing date -
Apr 20, 2011
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Abandoned
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Abstract
A method for using a metal bilayer is disclosed. First, a bottom electrode is provided. Second, a dielectric layer which is disposed on and is in direct contact with the lower electrode is provided. Then, a metal bilayer which serves as a top electrode in a capacitor is provided. The metal bilayer is disposed on and is in direct contact with the dielectric layer. The metal bilayer consists of a noble metal in direct contact with the dielectric layer and a metal nitride in direct contact with the noble metal.
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