DEFECT INSPECTING APPARATUS AND DEFECT INSPECTING METHOD
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United States of America Patent
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Issued Date -
Dec 4, 2014
app pub date -
May 27, 2014
filing date -
May 30, 2013
priority date (Note) -
Abandoned
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Abstract
Disclosed is an apparatus for appropriately inspecting a defect on at least one of organic layers stacked on a substrate in an organic light emitting diode. The apparatus includes: an illumination unit configured to irradiate a near infrared light of a wavelength ranging from 0.7 μm to 2.5 μm toward the at least one of the organic layers on a glass substrate; an imaging unit configured to image the at least one of the organic layers irradiated with the near infrared light illuminated from the illumination unit; and a processing container configured to accommodate the illumination unit and the imaging unit therein and perform inspection of the at least one of the organic layers. An inside of the processing container is maintained in an atmosphere at an oxygen concentration lower than an oxygen concentration of air and at a dew point temperature lower than a dew point temperature of air.
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