Liquid processing apparatus, liquid processing method, and computer-readable recording medium having program stored therein
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United States of America Patent
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Aug 18, 2015
Grant Date -
Dec 11, 2014
app pub date -
Aug 22, 2014
filing date -
Apr 18, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
Disclosed is a liquid processing apparatus including first and second cups installed so as to surround a rotation holding unit of a substrate and guide a processing liquid scattered from the rotating substrate downwards. A first driving unit and a second driving unit elevate the first cup and the second cup between a position receiving the processing liquid and the lower position thereof. A controller controls that the first cup and the second cup are ascended at the same time by transferring the driving force of the first driving unit while the first cup or a first elevating member thereof is overlapped with the second cup or a second elevating member thereof from the lower side by setting the ascending speed of the first cup to be higher than the ascending speed of the second cup when the first and second cups are ascended at the same time.
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