Method of manufacturing a liquid ejection head
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United States of America Patent
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Dec 8, 2015
Grant Date -
Dec 11, 2014
app pub date -
May 27, 2014
filing date -
Jun 6, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Provided is a method of manufacturing a liquid ejection head including: a substrate having energy generating elements disposed thereon; and an ejection orifice forming member having ejection orifices, the substrate and the ejection orifice forming member forming a flow path therebetween, the method including: forming, on the substrate, a mold having a recessed portion at a position corresponding to a region in which each of the ejection orifices is formed and in a vicinity of the position; forming a coating layer by chemical vapor deposition so as to cover the mold; and forming the ejection orifices through the coating layer to obtain the ejection orifice forming member.
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