Liquid ejecting head and liquid ejecting apparatus
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United States of America Patent
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May 5, 2015
Grant Date -
Dec 11, 2014
app pub date -
Jun 9, 2014
filing date -
Jun 10, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A liquid ejecting head includes a pressure chamber substrate formed of silicon where a pressure chamber is formed, and a communication plate penetrated by communication holes in a plate thickness direction, in which the pressure chamber partitioned by partition walls formed of crystal orientation planes being formed in the recording head through etching. Acute angle portions are formed, by the partition walls intersecting with each other at an acute angle, in both end portions of the pressure chamber in a first direction, and a first step is disposed in the middle of each of the acute angle portions in an etching direction. Parts of the communication holes are arranged at positions superimposed on the acute angle portions in a bonding surface and remaining parts of the communication holes are arranged on outer sides in the first direction with respect to the acute angle portions such that a second step is formed in a communication portion between the pressure chamber and the communication holes.
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