LOW-TEMPERATURE GAS SUPPLY DEVICE, HEAT TRANSFER MEDIUM-COOLING DEVICE, AND LOW-TEMPERATURE REACTION CONTROL DEVICE
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United States of America Patent
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Issued Date -
Dec 18, 2014
app pub date -
Oct 11, 2012
filing date -
Oct 11, 2011
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Abstract
A low-temperature gas supply device is provided with a first heat exchanger, in which a mixed gas mixing a vaporization gas of a low-temperature-liquefied gas with a gas of a temperature higher than the low-temperature-liquefied gas and the low-temperature-liquefied gas are introduced and heat-exchanged with each other, and the mixed gas is discharged as a low-temperature gas refrigerant and the low-temperature-liquefied gas is discharged as the vaporization gas; a mixing unit, in which the gas and the vaporization gas discharged from the first heat exchanger are mixed and discharged as the mixed gas; and a first control unit, in which, based on the difference between a detected temperature of the low-temperature gas refrigerant and an intended temperature, respective amounts of the gas introduced to the mixing unit and the vaporization gas are adjusted to control the temperature of the low-temperature gas refrigerant to the intended temperature.
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