Cold cathode ionization vacuum gauge and inner wall protection member

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United States of America Patent

PATENT NO 9316555
APP PUB NO 20140368210A1
SERIAL NO

14260545

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Abstract

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A cold cathode ionization vacuum gauge, including: two electrodes disposed such that one of the electrodes is surrounded by the other electrode to thereby form a discharge space therebetween; and an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode, wherein the electrode protection member has electric conductivity and is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode.

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Patent Owner(s)

  • CANON ANELVA CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Enomoto, Itaru Kawasaki, JP 2 21
Mano, Hideo Kawasaki, JP 3 35

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