Waveguide Filter, Preparation Method Thereof and Communication Device
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United States of America Patent
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Aug 5, 2014
filing date -
May 24, 2013
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Abandoned
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Abstract
A waveguide filter, a preparation method thereof, and a communication device to resolve a problem in which a prepared high-resonance-frequency waveguide filter cannot meet an application requirement due to a low precision of an existing machining process. The waveguide filter includes a substrate made of a silicon material, where an etching cavity having a flat side wall is formed in the substrate, a depth of the etching cavity is not greater than 0.7 mm, and an angle between the side wall of the etching cavity and a vertical direction is not smaller than 1 degree, and a waveguide port is disposed on the substrate, where the waveguide port is connected to the etching cavity and electrically connected to the etching cavity.
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