LIQUID PROCESSING SYSTEM AND CONTROL METHOD
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United States of America Patent
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app pub date -
Sep 16, 2014
filing date -
Mar 16, 2012
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Abstract
A liquid processing system has: processing units of n stages in which each processing unit includes one or a plurality of processing lines, each processing line includes an ultraviolet ray irradiating unit, and the number of processing lines of an m-th stage processing unit is larger than the number of processing lines of an m+1-th stage processing unit; and adjusting section which adjusts an output of an ultraviolet ray irradiating unit provided to a processing unit of a predetermined stage. An output of an ultraviolet ray irradiating unit provided to a processing unit of a stage other than the predetermined stage is each fixed, and the adjusting section adjusts the output of the let ray irradiating unit provided to the processing unit of the predetermined stage such that a liquid processed in an n-th stage processing unit of a final stage is in a desired processing state.
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