Blanking apparatus, drawing apparatus, and method of manufacturing article

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United States of America Patent

PATENT NO 9040935
SERIAL NO

14312953

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Abstract

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The present invention provides a blanking apparatus comprising a plurality of blankers configured to respectively blank a plurality of beams with respect to a target position on an object, and a driving device configured to drive the plurality of blankers, wherein the driving device includes a change device configured to change relation between a combination of beams of the plurality of beams, and a target dose.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Morita, Tomoyuki Utsunomiya, JP 21 159
Muraki, Masato Inagi, JP 101 2536

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