Drawing apparatus, and method of manufacturing article by controlling a plurality of charged particle optical systems based on respective sets of sub-drawing regions
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United States of America Patent
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Jul 23, 2019
Grant Date -
Jan 1, 2015
app pub date -
Jun 12, 2014
filing date -
Jun 26, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A drawing apparatus includes: a plurality of charged particle optical systems arranged along a first direction; a storage configured to store drawing data shared by the plurality of charged particle optical systems with respect to each of sub-drawing regions obtained by dividing a drawing region on the substrate of each of the plurality of charged particle optical systems in the first direction; and a controller configured to determine a drawing region on the substrate by each of the plurality of charged particle optical systems as a set of the sub-drawing regions, and control each of the plurality of charged particle optical systems based on a corresponding set of the sub-drawing regions.
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