MEMS device having a suspended diaphragm and manufacturing process thereof

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United States of America Patent

PATENT NO 9233834
APP PUB NO 20150001651A1
SERIAL NO

14316504

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Abstract

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A MEMS device wherein a die of semiconductor material has a first face and a second face. A diaphragm is formed in or on the die and faces the first surface. A cap is fixed to the first face of the die and has a hole forming a fluidic path connecting the diaphragm with the outside world. A closing region, for example a support, a second cap, or another die, is fixed to the second face of the die. The closing region forms, together with the die and the cap, a stop structure configured to limit movements of the suspended region in a direction perpendicular to the first face.

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Patent Owner(s)

  • STMICROELECTRONICS S.R.L.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Castoldi, Laura Maria Abbiategrasso, IT 12 68
Faralli, Dino Milan, IT 21 209
Ferrari, Paolo Gallarate, IT 90 925

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