NOZZLE AND NOZZLE HEAD
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United States of America Patent
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Issued Date -
Jan 1, 2015
app pub date -
Feb 12, 2013
filing date -
Feb 17, 2012
priority date (Note) -
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Abstract
A nozzle and nozzle head arranged to subject a surface of a substrate to gaseous precursors. The nozzle includes an output face via which the precursor is supplied, a longitudinal precursor supply element for supplying precursor and a longitudinal discharge channel open to and along the output face for discharging at least a fraction of the precursor supplied from the precursor channel. The precursor supply element is arranged to extend inside the discharge channel such that the precursor supply element divides the discharge channel in the longitudinal direction to a first discharge sub-channel and a second discharge sub-channel on opposite sides of the precursor supply element for supplying precursor through the discharge channel.
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