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Abstract

An anti-reflection film includes first through ninth layers. Regarding light having a wavelength of 550 nm, where the refractive indexes of the first through ninth layers are n1 through n9 respectively, the optical film thicknesses d1 through d9 (nm) respectively, and the maximum value of the difference in the refractive index between adjoining layers for layers 1 through 8 is Δn, the following conditions are satisfied.

description='In-line Formulae' end='lead'1.60≦n1≦1.70, 15 nm≦d1≦140 nm,description='In-line Formulae' end='tail'

description='In-line Formulae' end='lead'2.00≦n2≦2.40, 20 nm≦d2≦120 nm,description='In-line Formulae' end='tail'

description='In-line Formulae' end='lead'1.60≦n3≦1.70, 11 nm≦d3≦70 nm,description='In-line Formulae' end='tail'

description='In-line Formulae' end='lead'2.00≦n4≦2.40, 20 nm≦d4≦165 nm,description='In-line Formulae' end='tail'

description='In-line Formulae' end='lead'1.60≦n5≦1.70, 15 nm≦d5≦45 nm,description='In-line Formulae' end='tail'

description='In-line Formulae' end='lead'2.00≦n6≦2.40, 90 nm≦d6≦175 nm,description='In-line Formulae' end='tail'

description='In-line Formulae' end='lead'1.60≦n7≦1.70, 50 nm≦d7≦110 nm,description='In-line Formulae' end='tail'

description='In-line Formulae' end='lead'2.00≦n8≦2.40, 20 nm≦d8≦50 nm,description='In-line Formulae' end='tail'

description='In-line Formulae' end='lead'1.20≦n9≦1.28, 140 nm≦d9≦160 nm, anddescription='In-line Formulae' end='tail'

description='In-line Formulae' end='lead'0.40≦Δn≦0.67.description='In-line Formulae' end='tail'

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