METHOD FOR PRODUCING METAL OXIDE FILM AND METAL OXIDE FILM
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United States of America Patent
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Jan 8, 2015
app pub date -
Oct 24, 2012
filing date -
Feb 8, 2012
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Abstract
The present invention includes the steps of (A) forming a solution containing zinc into mist and spraying the solution formed into mist onto a substrate under no vacuum to form a metal oxide film on the substrate, and (B) irradiating the metal oxide film with ultraviolet rays to decrease a resistance of the metal oxide film. Further, the step (B) includes the steps of (B-1) determining, in accordance with a film thickness of the metal oxide film, wavelengths of the ultraviolet rays to be radiated, and (B-2) irradiating the metal oxide film with the ultraviolet rays having the wavelengths determined in said step (B-1).
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