Method and device for bonding workpieces each produced from glass substrate or quartz substrate

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10138162
APP PUB NO 20150013388A1
SERIAL NO

14380746

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Abstract

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Vacuum ultraviolet light with a wavelength of 200 nm or less is applied on the joining surfaces of first and second workpieces made from a crystal substrate and a glass substrate, or a glass substrate and a glass substrate from a light irradiation unit. The workpieces are conveyed to a workpiece cleaning and laminating mechanism by a conveyance mechanism, the joining surfaces are subjected to mega-sonic cleaning as needed, and the workpieces are aligned with the joining surfaces thereof facing each other, and laminated such that the joining surfaces are in contact with each other. After being laminated, the laminated workpieces are conveyed to a workpiece heating mechanism and heated to increase the workpiece temperature to a predetermined temperature, and this temperature is maintained until joining is completed. The laminated workpieces are brought into a thermally expanded state upon heating, and are joined in this state.

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Patent Owner(s)

  • USHIO DENKI KABUSHIKI KAISHA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kato, Akira Tokyo, JP 460 6701
Morita, Kinichi Tokyo, JP 21 24
Suzuki, Shinji Tokyo, JP 247 2428

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