CERAMIC HEATER
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United States of America Patent
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Issued Date -
Jan 15, 2015
app pub date -
Jul 12, 2013
filing date -
Jul 12, 2013
priority date (Note) -
Abandoned
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Abstract
An electrically conductive ceramic heating element for use in a reactor for depositing a film of material onto a semiconductor wafer, said reactor comprising a reactor chamber, a radiative heating device disposed within the reactor chamber including the heating element and operative for heating said wafer to a temperature of greater than 1100 degrees C., a wafer carrier disposed within the reactor chamber and adjacent to the radiative heating device, the wafer carrier having at least one wafer cavity for supporting a semiconductor wafer for having a film of material be deposited thereon.
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