Reflective original, exposure method, and device manufacturing method

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United States of America Patent

PATENT NO 9213231
APP PUB NO 20150017573A1
SERIAL NO

14325537

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Abstract

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A reflective original includes: a reflection layer which has a multilayer film configured to reflect extreme ultraviolet light; a base material configured to support the reflection layer; and a thermal diffusion layer interposed between the reflection layer and the base material, and configured to diffuse heat of the reflection layer. A heat capacity, per unit area, of a structure constituted by both the reflection layer and the thermal diffusion layer is not lower than 1.1 (J/(K·m2)).

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHA30-2 SHIMOMARUKO 3-CHOME OHTA-KU TOKYO 146-8501

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Miyake, Akira Nasukarasuyama, JP 114 1328
Yonekawa, Masami Utsunomiya, JP 23 214

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