SPUTTERING DEVICE
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United States of America Patent
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N/A
Issued Date -
Jan 22, 2015
app pub date -
Jul 15, 2014
filing date -
Jul 19, 2013
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
In a sputtering device of the present invention, a long film is guided by a plurality of concave guide rolls. Pressure imposed on the long film from the plurality of concave guide rolls is strong as near as an end and is weak as near as the center. Accordingly, the long film is substantially supported in an end portion of each of the concave guide rolls. Since wrinkles generated on the long film are not subjected to strong pressure from the concave guide rolls when passing through the concave guide rolls, these wrinkles do not turn to folds and pass through as they are.
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