Semiconductor device and method of forming overlapping semiconductor die with coplanar vertical interconnect structure

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United States of America Patent

PATENT NO 9721925
SERIAL NO

14514190

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Abstract

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A semiconductor device is made by forming first and second interconnect structures over a first semiconductor die. A third interconnect structure is formed in proximity to the first die. A second semiconductor die is mounted over the second and third interconnect structures. An encapsulant is deposited over the first and second die and first, second, and third interconnect structures. A backside of the second die is substantially coplanar with the first interconnect structure and a backside of the first semiconductor die is substantially coplanar with the third interconnect structure. The first interconnect structure has a height which is substantially the same as a combination of a height of the second interconnect structure and a thickness of the second die. The third interconnect structure has a height which is substantially the same as a combination of a height of the second interconnect structure and a thickness of the first die.

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Patent Owner(s)

  • STATS CHIPPAC PTE. LTE.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bathan, Henry D Singapore, SG 59 1162
Camacho, Zigmund R Singapore, SG 60 1685
Pisigan, Jairus L Singapore, SG 7 70

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