DRIVING APPARATUS, CHARGED PARTICLE BEAM IRRADIATION APPARATUS, METHOD OF MANUFACTURING DEVICE
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United States of America Patent
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Issued Date -
Feb 5, 2015
app pub date -
Jul 28, 2014
filing date -
Jul 31, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A driving apparatus includes an electromagnetic actuator configured to generate a motive power by an electromagnetic force; a movable portion configured to be movable by the electromagnetic actuator; a magnetic shield unit that surrounds the electromagnetic actuator, wherein the magnetic shield unit includes a first magnetic shield having an opening and a second magnetic shield having an opening arranged in this order from a side closer to electromagnetic actuator. The opening opposes the second magnetic shield at least part of an area of the opening, and the movable portion is bent so as to penetrate through the openings of the first and the second magnetic shields.
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