DRAWING APPARATUS AND ARTICLE MANUFACTURING METHOD
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United States of America Patent
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Issued Date -
Feb 5, 2015
app pub date -
Jul 18, 2014
filing date -
Jul 30, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A drawing apparatus for performing drawing on a substrate includes: a decelerating electrostatic lens configured to decelerate a charged particle beam emitted by a charged particle source; a division unit having a plurality of apertures and configured to divide the charged particle beam decelerated by the decelerating electrostatic lens into a plurality of charged particle beams; and an accelerating electrostatic lens configured to accelerate the plurality of charged particle beams divided by the division unit.
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