Voltage contrast inspection of deep trench isolation

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United States of America Patent

PATENT NO 9293382
APP PUB NO 20150041809A1
SERIAL NO

14522626

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Abstract

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A method including forming a first test structure and a second test structure in electrical contact with an inner buried plate and an outer buried plate, respectively, where the first and second test structures each comprise a deep trench filled with a conductive material, and measuring the voltage of the inner buried plate and the outer buried plate immediately after the formation of a deep trench isolation structure, where the inner buried plate and the outer buried plate are positioned on opposite sides of the deep trench isolation structure.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arnold, Norbert Hopewell Junction, US 23 544
Liu, Jin Chappaqua, US 305 3396
Messenger, Brian W Newburgh, US 9 229
Patterson, Oliver D Poughkeepsie, US 30 1662

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