IMPRINT DEVICE AND IMPRINT METHOD
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United States of America Patent
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Issued Date -
Feb 12, 2015
app pub date -
Feb 13, 2013
filing date -
Feb 14, 2012
priority date (Note) -
Published
status (Latency Note)
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Abstract
An imprinting device having a stage and a cover that depress the die and the molding target, a frame formed with a hole into which the stage is fitted and surrounding an outer circumference thereof, a first moving means for relatively moving the stage and the cover in a direction coming close to or becoming apart from each other, a second moving means for relatively moving the cover and the frame in a direction coming close to or becoming apart from each other, a first depressurizing means for depressurizing a depressurizing room formed any one of the cover, the die or the molding target, and the stage, and further the frame, and eliminating a fluid between the die and the molding target, and a second depressurizing means for eliminating a fluid in a space between the cover and the die or the molding target. The imprinting device can be thus downsized and costs can be reduced.
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