METAL NITRIDE MATERIAL FOR THERMISTOR, METHOD FOR PRODUCING SAME, AND FILM TYPE THERMISTOR SENSOR

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United States of America Patent

APP PUB NO 20150042445A1
SERIAL NO

14455625

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Abstract

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Provided are a metal nitride material for a thermistor, which has a high reliability and high heat resistance and can be directly deposited on a film or the like without firing, a method for producing the same, and a film type thermistor sensor.

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Patent Owner(s)

Patent OwnerAddress
MITSUBISHI MATERIALS CORPORATIONTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujita, Toshiaki Naka-shi, JP 42 300
Nagatomo, Noriaki Naka-shi, JP 31 102
Tanaka, Hiroshi Naka-shi, JP 1050 11756

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