Lithography apparatus, and article manufacturing method

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United States of America Patent

PATENT NO 9639008
SERIAL NO

14451727

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Abstract

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A lithography apparatus includes a measuring station that includes a first measuring device configured to measure a height of a substrate holder, and a second measuring device configured to measure a height of a surface of a substrate held by the holder, and a patterning station that includes a third measuring device configured to measure a height of the holder, and patterns the substrate held by the holder based on an output of the second measuring device. The patterning station includes a fourth measuring device configured to measure a height of a surface of a substrate held by the holder. The lithography apparatus includes a controller configured to obtain a correction value for an output obtained from at least one of the first and third measuring devices based on outputs of the second and fourth measuring devices with respect to a substrate held by the holder.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Morikuni, Yuichiro Utsunomiya, JP 3 5
Morimoto, Osamu Utsunomiya, JP 89 788
Ohsaki, Yoshinori Utsunomiya, JP 28 386

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