Mask design and decomposition for sidewall image transfer
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 10, 2016
Grant Date -
Feb 12, 2015
app pub date -
Aug 7, 2013
filing date -
Aug 7, 2013
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A design level compatible with a sidewall image transfer process employs an alternating grid of mandrel-type line tracks and non-mandrel-type line tracks. Target structure design shapes are formed such that all vertices of the target structure design shapes are on the grid. The target structure design shapes are classified as mandrel-type design shapes and non-mandrel-type design shapes depending on the track type of the overlapping line tracks for lengthwise portions. All mandrel-type line tracks and straps of the mandrel-type design shapes less lateral strap regions of the non-mandrel-type design shapes collectively form mandrel design shapes, which can be employed to generate a first lithographic mask. Sidewall design shapes are generated from the mandrel design shapes. Blocking shapes for a second lithographic mask can be generated by selecting all areas that are not included in the target structure design shapes or the sidewall design shapes.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully