METHODS FOR MANUFACTURING POLISHING PAD AND POLISHING APPARATUS
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United States of America Patent
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Issued Date -
Feb 19, 2015
app pub date -
Aug 8, 2014
filing date -
Aug 16, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention relates to a method for manufacturing a polishing pad. The method of the invention includes the steps of (a) providing a releasing carrier; (b) providing a foaming resin composition; (c) coating the foaming resin composition of the step (b) on the carrier of the step (a); and (d) curing the foaming resin composition of the step (c). The invention also provides a process for manufacturing a polishing apparatus.
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