Material inspection apparatus and material inspection method
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United States of America Patent
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Mar 15, 2016
Grant Date -
Feb 19, 2015
app pub date -
Dec 3, 2013
filing date -
Aug 14, 2013
priority date (Note) -
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Abstract
A material inspection apparatus according to the present embodiment includes a sample mount capable of mounting a sample. A detector detects an atom desorbed from the sample. A voltage generator applies a voltage to the sample. A laser generator irradiates a laser beam onto the sample. An arithmetic part processes a detection result of the detector. A storage part stores a detection prediction range of a certain element and an isotope of the certain element. A display displays the detection prediction range and an actual detection result of the detector in a comparable manner.
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