Microelectromechanical systems comprising differential inductors and methods for making the same
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United States of America Patent
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Jul 28, 2015
Grant Date -
Feb 19, 2015
app pub date -
Aug 19, 2013
filing date -
Aug 19, 2013
priority date (Note) -
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Abstract
An integrated Microelectromechanical Systems (“MEMS”) device (100). The MEMS device comprises a substrate (200, 300), a transition portion (118), and a differential inductor (1000, 1100, 1300). The transition portion is connected to and at least partially extends transversely away from a major surface of the substrate. The differential inductor is mechanically suspended above a major surface of the substrate at least partially by the transition portion. The differential inductor is also electrically connected to an electronic circuit external thereto by the transition portion. A first dielectric gap exists between the major surface of the substrate and the differential inductor.
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