Methods of manufacturing piezoelectric element, liquid ejecting head, and ultrasonic transducer

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United States of America Patent

PATENT NO 9682560
APP PUB NO 20150052715A1
SERIAL NO

14462968

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of manufacturing a piezoelectric element includes a first electrode, a piezoelectric layer, and a second electrode, in which unevenness on one surface of the piezoelectric layer is formed by forming an oxidizable metal layer on the one surface of the piezoelectric layer; aggregating the metal layer by thermal oxidation; and performing isotropic etching on the metal layer aggregated on the one surface of the piezoelectric layer.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kamijo, Takahiro Matsumoto, JP 55 2847
Shimizu, Toshihiro Fujimi-machi, JP 170 1400
Takabe, Motoki Shiojiri, JP 148 335
Torimoto, Tatsuro Matsumoto, JP 20 76
Yazaki, Shiro Chino, JP 66 444

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