Stage apparatus, and charged particle beam apparatus using same
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United States of America Patent
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Jun 14, 2016
Grant Date -
Feb 26, 2015
app pub date -
Aug 19, 2014
filing date -
Aug 26, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
The purpose of the present invention is to provide a stage apparatus that effectively suppresses the transmission of heat generated by a drive mechanism to a sample, and a charged particle beam apparatus using the same. In order to achieve the purpose, there are proposed a stage apparatus and a charged particle beam apparatus. The stage apparatus comprises a table; a drive source that drives the table in a predetermined direction; a first connection member provided between the table and the drive source; a second connection member provided between the table and the drive source and closer to the drive source than the first member; a slide unit supported by the second connection member; and a rail guiding the slide unit in a predetermined direction, the first connection member comprising a member having a relatively low heat conductivity with respect to the second connection member.
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