Plasma generating device

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United States of America Patent

PATENT NO 9576775
APP PUB NO 20150054405A1
SERIAL NO

14532894

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention relates to a plasma generation device comprising a plurality of plasma modules for generating a plasma. Each plasma module has a module housing with at least one gas inlet for supplying a process gas. Furthermore, a discharge device for generating the plasma from the process gas and a plasma outlet are provided. The plasma generation device has at least two plasma modules for generating a plasma. Each plasma module has at least one gas outlet for some of the process gas, wherein the at least one gas outlet of at least one plasma module issues into a respective gas inlet of another plasma module.

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Patent Owner(s)

  • EPCOS AG;RELYON PLASMA GMBH;REYLON PLASMA GMBH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kuegerl, Georg Eibiswald, AT 14 44
Nettesheim, Stefan Berlin, DE 39 180
Puff, Markus Graz, AT 37 80

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