DEPOSITION METHOD AND DEPOSITION APPARATUS

United States of America Patent

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Issued Date
Feb 26, 2015
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Jul 25, 2013
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Aug 9, 2012

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Abstract

[Object] To provide a deposition method and a deposition apparatus capable of forming a metal compound layer having desired film characteristics uniformly in a substrate surface.

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ULVAC INC	CHIGASAKI-SHI KANAGAWA 253-8543

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Inventor Name	Address	# of filed Patents	Total Citations
Fukuda, Natsuki	Shizuoka, JP	21	75
Fukuju, Kazunori	Shizuoka, JP	3	12
Nishioka, Yutaka	Shizuoka, JP	21	111
Suu, Koukou	Shizuoka, JP	55	882

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DEPOSITION METHOD AND DEPOSITION APPARATUS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

14348006

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14348006

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