POLISHING COMPOSITION

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United States of America Patent

APP PUB NO 20150060400A1
SERIAL NO

14394953

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention provides a polishing composition that can suppress generation of bumps due to etching on a surface of an object to be polished having a germanium material-containing part during the polishing of the object.

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Patent Owner(s)

Patent OwnerAddress
FUJIMI INCORPORATEDKIYOSU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tamada, Shuichi Kiyosu-shi, JP 13 46

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