IMAGE SENSORS WITH SILICIDE LIGHT SHIELDS

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United States of America Patent

SERIAL NO

14464408

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Abstract

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An image sensor with an array of image sensor pixels is provided. Each image pixel may include a photodiode and associated pixel circuits formed in a semiconductor substrate. Buried light shielding structures may be formed on the substrate to prevent pixel circuitry that is formed in the substrate between two adjacent photodiodes from being exposed to incoming light. The buried light shields may be formed over conductive gate structures. A metal silicide layer may be formed to completely cover these conductive gate structures. Antireflective coating material may optionally be formed over the metal silicide layer. Forming gate structures with a metal silicide liner can help reduce optical pixel crosstalk and enhance global shutter efficiency.

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Patent Owner(s)

Patent OwnerAddress
DEUTSCHE BANK AG NEW YORK BRANCH AS COLLATERAL AGENT60 WALL STREET NEW YORK NY 10005

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Komori, Hirofumi San Jose, US 40 451
Lenchenkov, Victor Sunnyvale, US 42 466

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