Inspecting apparatus and inspecting method
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United States of America Patent
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Sep 15, 2015
Grant Date -
Mar 5, 2015
app pub date -
Jan 29, 2014
filing date -
Aug 27, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
According to one embodiment, an inspecting apparatus is provided with a contact position obtaining unit and an inspection status determining unit. The contact position obtaining unit obtains, by using an inspection result of whether there is a particle on an inspection surface of a holding object and coordinate information of a convex portion in an electrostatic chuck holding mechanism, a contact position of the inspection surface with the convex portion. The inspection status determining unit determines whether a size of the particle adhering to a contact region with the convex portion of the inspection surface is within an allowable range by using a first determining criterion value and determines whether the size of the particle adhering to a non-contact region with the convex portion of the inspection surface is within an allowable range by using a second determining criterion value larger than the first determining criterion value.
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