Cluster mass flow devices and multi-line mass flow devices incorporating the same

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United States of America Patent

PATENT NO 9335768
APP PUB NO 20150068613A1
SERIAL NO

14025162

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Abstract

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A multi-line mass flow device configured for controlled delivery of two or more fluids into a process chamber. The multi-line mass flow device comprises a cluster mass flow control manifold and a multi-inlet manifold. The cluster mass flow control manifold comprises a controller, a gas manifold mounting block, and two or more gas flow control stations. The multi-inlet manifold comprises a multi-inlet mounting block, and two or more isolation valves mounted on the multi-inlet mounting block.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Shareef, Iqbal Fremont, US 18 473
Taskar, Mark San Mateo, US 21 559

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