Importance

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Abstract

A system includes an electrostatic lens positioned in a path between a charged-particle source and a charged-particle detector. The electrostatic lens includes: a first electrode having a first aperture positioned in the path and aligned with a first axis; a second electrode positioned in the path between the first electrode and the charged-particle detector, the second electrode having a second aperture positioned in the path and aligned with a second axis, the second axis being parallel to the first axis and displaced from the first axis along a first direction; a third electrode positioned in the path between the first electrode and the second electrode; and a potential generator coupled to the first, second, and third electrodes. During operation, the potential generator applies a first potential to the first electrode, a second potential to the second electrode, and a third potential to the third electrode so that the electrostatic lens directs a beam of charged particles from the charged-particle source propagating along the first axis to propagate along the second axis.

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First Claim