NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME

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United States of America Patent

SERIAL NO

14191844

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Abstract

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According to one embodiment, a nonvolatile semiconductor memory device, includes: control gate electrodes provided above semiconductor regions; a charge accumulation layer; a first insulating film; a second insulating film; a select gate electrode; a conductive structural body located on opposite side of the select gate electrode from the plurality of control gate electrodes, the conductive structural body provided on each of the plurality of semiconductor regions, and the conductive structural body including a fourth insulating film, a semiconductor-containing layer provided on the fourth insulating film, and a conductive film in contact with a sidewall of the fourth insulating film and a sidewall of the semiconductor-containing layer; and a contact electrode extending in a third direction from a side of the plurality of semiconductor regions to a side of the plurality of control gate electrodes, and the contact electrode connected to the conductive structural body.

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Patent Owner(s)

Patent OwnerAddress
KABUSHIKI KAISHA TOSHIBA1-1 SHIBAURA 1-CHOME MINATO-KU TOKYO 105-0023

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
NISHIHARA, Kiyohito Mie-ken, JP 39 538

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