RF impedance model based fault detection

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United States of America Patent

PATENT NO 10128090
APP PUB NO 20150069912A1
SERIAL NO

14540924

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Abstract

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A method to detect a potential fault in a plasma system is described. The method includes accessing a model of one or more parts of the plasma system. The method further includes receiving data regarding a supply of RF power to a plasma chamber. The RF power is supplied using a configuration that includes one or more states. The method also includes using the data to produce model data at an output of the model. The method includes examining the model data. The examination is of one or more variables that characterize performance of a plasma process of the plasma system. The method includes identifying the fault for the one or more variables. The method further includes determining that the fault has occurred for a pre-determined period of time such that the fault is identified as an event. The method includes classifying the event.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Muraoka, Peter T San Mateo, US 2 24
Rogers, James Hugh Los Gatos, US 7 113
Valcore,, Jr John C Berkeley, US 89 1575
Webb, Nicholas Edward Milpitas, US 2 24

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