Physical quantity sensor, vibratory device, electronic apparatus, and moving object

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United States of America Patent

PATENT NO 9739643
SERIAL NO

14479868

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A physical quantity sensor includes a substrate, a fixation section and a wiring line provided to the substrate, a contact section adapted to electrically connect the fixation section and the wiring line to each other, and a movable electrode electrically connected to the wiring line via the fixation section. The contact section is disposed in the fixation section in a second area outside a first area obtained by imaginarily extending a fixed support area in a displacement direction of the movable electrode in a plan view. The fixed support area is sandwiched by edge portions of an area where the movable electrode and the fixation section are connected to each other.

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First Claim

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tanaka, Satoru Chino, JP 335 3272

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