ELECTROSTATIC CHUCK MEMBER
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United States of America Patent
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Issued Date -
Mar 12, 2015
app pub date -
Aug 3, 2012
filing date -
Jan 30, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
There is provided an electrostatic chuck member made of a complex oxide sintered body obtained by substituting some of yttrium in yttrium aluminum oxide with a rare earth element (RE) excluding yttrium, in which a ratio [NRE/(NY+NRE)] of the number of atoms of the rare earth element excluding yttrium (NRE) to the sum (NY+NRE) of the number of yttrium atoms (NY) and the number of the atoms of the rare earth element excluding yttrium (NRE) is in a range of 0.01 to less than 0.5, and a volume resistance of the complex oxide sintered compact is in a range of 1×1010 Ω·cm to less than 1×1015 Ω·cm.
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