MICROPATTERN FORMATION METHOD, RELEASE METHOD, MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD, MAGNETIC RECORDING MEDIUM, AND STAMPER MANUFACTURING METHOD
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United States of America Patent
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Issued Date -
Mar 12, 2015
app pub date -
Jan 10, 2014
filing date -
Sep 10, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
According to one embodiment, there is provided a pattern formation method including forming a target layer to be processed on a substrate, adding a second dispersion containing a polymer material including a polymer chain having a base metal at a terminal end and a second solvent to a first dispersion containing noble-metal microparticles and a first solvent, thereby preparing a noble-metal microparticle layer coating solution in which microparticles covered with the polymer material are dispersed, arranging the noble-metal microparticles covered with the polymer material on the target layer by using the noble-metal microparticle layer coating solution, and transferring a projections pattern of the noble-metal microparticles covered with the polymer material to the target layer.
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