Measurement apparatus, measurement method, and method of manufacturing article

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United States of America Patent

PATENT NO 9664604
APP PUB NO 20150073740A1
SERIAL NO

14477331

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Abstract

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The present invention provides a measurement apparatus which includes a probe having a leading edge portion configured to come into contact with a surface to be measured and a holding portion configured to hold the leading edge portion, and measures a shape of the surface by scanning the probe relative to the surface in a state in which the leading edge portion and the surface are in contact, comprising a processing unit configured to correct measurement data at a measurement point on the surface based on data of a scanning distance of the probe and information about abrasion of the leading edge portion caused by scanning of the probe.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iwasaki, Yasushi Yokohama, JP 5 7

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