TURBINE POWERED CLEANING APPARATUS
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United States of America Patent
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Oct 7, 2014
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Nov 4, 2010
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Abstract
A rotary turbine cleaning device for cleaning semiconductor fabrication equipment works in conjunction with a clean room vacuum or other vacuum or other air pump. The fluid flow created by the vacuum action causes the rotors of the turbine assembly to rotate, thereby rotating the cleaning head. Attached to the cleaning head are bristles or other cleaning media which may dislodge particles from surfaces. The dislodged particles are drawn into the tube through an opening at the end of the tube and the vacuum action. In some embodiments, a lumen delivers a cleaning fluid to the cleaning head.
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