NOZZLE UNIT AND SUBSTRATE-PROCESSING SYSTEM INCLUDING THE NOZZLE UNIT

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United States of America Patent

APP PUB NO 20150083821A1
SERIAL NO

14396119

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A substrate treating equipment includes a process tube receiving a boat in which a plurality of substrates are loaded, a heater assembly installed to surround the process tube, a nozzle unit supplying a process gas for forming a thin film on surfaces of the substrates into the process tube. The nozzle unit includes a heating reflecting member blocking and reflecting thermal energy provided from the heater assembly.

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Patent Owner(s)

Patent OwnerAddress
KOOKJE ELECTRIC KOREA CO LTDCHUNGNAM SOUTH KOREA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Dong Yeul Chungcheongnam-do, KR 7 44
Lee, Sung Kwang Chungcheongnam-do, KR 7 21
Park, Yong Sung Chungcheongnam-do, KR 39 219

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